KLA-Tencor先进的探针式台阶仪,可精确测量纳米级至2毫米台阶高度,并可分析薄膜表面粗糙度、波纹度、应力,集高测量精度、多功能性和经济性于一体,是生产线及材料分析等应用领域的理想选择。因其具有6.0A (1σ)或0.1%台阶高度重复性以及亚埃级的分辨率,是目前商业化仪器里(经市场验证)最高精度的台阶仪产品。


D系列台阶仪:Alpha-Step D-600 Stylus Profiler
   KLA-Tencor  AlphaStep轮廓仪配置自动台,采用了新型光学反射探测系统来测量高度,同时应用电磁力控制探针压力,能有效的实现超微力和低惯量 。这些创新型使表面轮廓仪能够无伤测量软薄膜样品。

The Alpha-Step? D-600 offers high resolution 2D & 3D pro?ling, 2D stress, pro?le stitching, and many more features in an easy-to-use platform with the best price-to-performance available in the market. The D-600 system includes an innovative optical lever sensor technology that provides the highest vertical range at 1200 μm, sub-Angstrom resolution plus low force, 0.03 to 15 mg. The ability to measure a wide range of applications, from nanometer to millimeter steps, high resolution roughness, soft materials, and thin ?lm stress enables the D-600 to serve various industries in research and development and production environments.

 

The D-600 includes a 200 mm motorized stage, with 150 x 178 mm X-Y range of motion. The new sequencing software features manual deskew alignment and programming up to 1000 locations on a sample. The system features advanced optics, a high resolution 5 MP camera with a 4x digital zoom and enhanced video controls for highly versatile sample visualization.

 

Applications

The D-600 is capable of addressing a wide range of measurements and applications:


?  Precision step height

?  Surface form, bow

?  Surface texture

?  Material acterizations

?  Thin ?lm stress

?  3D scanning

PRODUCT FEATURES

The D-600 stylus pro?lers provide a wide range of application speci?c capabilities, meeting the needs of the research, engineering, and production communities.

Stylus Pro?ling

The 200 mm sample stage supports scan lengths up to 55 mm in a single scan and up to 200 mm utilizing the stitching function. The D-600 provides the highest vertical range at 1200 μm and low force sensor technology at 0.03 mg, ensuring scan precision on an array of applications, including thin ?lms, soft materials, tall steps,

bow, and stress.

 

High Resolution Camera

The D-600 features advanced optics that includes a high resolution 5 MP color camera with 4x digital zoom and enhanced lighting controls.

Keystone Correction

New keystone correction software automatically removes video view sample distortion due to the angled optics.

Arc Correction

New arc correction software removes arc motion error during scanning, improving accuracy for sidewall angles and step width measurements.

3D Scanning & 2D Stress (optional)

3D scanning produces photo-realistic surfaces, enabling detailed surface topography analysis of step height, texture, and sample form. 2D stress utilizes Stoney’s Equation and changes in sample bow, before and after processing,to calculate thin ?lm stress.


Step Height Repeatability

A sub-Angstrom resolution, optical lever sensor translates into the most repeatable low mass, low noise sensor design. This enables step height repeatability of 5 ? on a 1 μm step for demanding process needs.




Intuitive User Interface

New, simpli?ed recipe creation enables quick setup of 3D scans, sequencing for multiple site measurements, sequence alignment reference points, and automated stitching for ?lm stress.






Recipe and system hardware controls are shown in the same display for quick sample positioning and measurement.Raw data is saved, enabling data re-analysis without the need for new measurements.



Copyright ? 2009-2015 Shanghai NTI Co., Ltd. All Rights Reserved ag亚游官方网沪ICP备09019032号-3
公司地址:上海市徐汇区宛平南路521号 电话:021-64283335 传真:021-64283339
邮箱:ag亚游官方网admin@shnti.com
在线客服 产品咨询
俄3月迎总统大选:普京国情咨文将与竞选纲领一致 美再挥制裁大棒 俄回应:不会因外部压力改变路线 宋春雳任军委国防动员部征集局长 邓普顿基金:北美贸易进展未明 投资者做好分散准备 南昌赛前冠军遭遇下马威 段莹莹首轮遗憾出局 日本东京都一栋大楼突发大火 造成2人死亡40人伤 人大代表关注网约车监管:“还有问题没解决” 经纪人亲承托雷斯愿赴中超:中国美国二选一 北京发布雷电蓝色预警 今夜有雷阵雨并伴短时大风 孔蒂最后的救赎!再踩穆帅夺冠 还是难逃下课? 小威获罗杰斯杯外卡 其余两张奖颁发给本土选手 印尼爪哇岛发生山体滑坡 致5人遇难15人失踪
快递小哥走进中南海:8分钟压轴发言提了两点建议 何小鹏:未来交通要做好 需从底层技术做起 谭秦东患精神疾病入院 曾因批鸿茅药酒被跨省抓捕 新政让权健联赛亚冠态势相反 功利中超更为艰难 用生命送餐 外卖小哥违章被扣3351分罚款近18万元 围绕这个国家的口水仗 可能影响中东局势 安倍丑闻缠身压力山大 老毛病又犯急往医院跑 保本基金到期转型:国联安安稳今年第14只到期产品 江苏两法官创作歌曲《宁海路75号》 拍MV被刷屏 范若愚:桐庐象青赛规格高 马天越:培养后备力量 汕头大学四位女生划艇穿越大西洋打破世界纪录 苹果正在开发一款高端耳机 最早今年年底发布
CBA赔率:广厦取胜概率大 山东奇兵也难救主 “高考机器人”背后的创始人:不再强调分数与技术 人民日报:外汇市场运行保持稳定 女大学生卖猪肉丢面子?她这么说网友纷纷点赞 证监会对长生生物立案调查:涉嫌信息披露违法违 中财办副主任:新预算法后有地方政府变换花样举债 解放军第83集团军军长揭秘朱日和神秘之师(图) 工信部谈网络提速:今年过半宽带用户可享百兆速率 许家元夺得日本“福萌杯” 今年国内赛事未尝败绩 台妇联会被暗算三百多亿财产充公 民进党吃相难看 阿里巴巴集团、文投控股战略投资万达电影 七旬老翁逛街突发脑溢血晕倒 好心男跪地吸痰急救 苏宁抵迪拜马不停蹄开练 意大利国家队顾问助阵 ag亚游官方网