D系列台阶仪：Alpha-Step D-600 Stylus Profiler
KLA-Tencor AlphaStep轮廓仪配置自动台，采用了新型光学反射探测系统来测量高度，同时应用电磁力控制探针压力，能有效的实现超微力和低惯量 。这些创新型使表面轮廓仪能够无伤测量软薄膜样品。
The Alpha-Step? D-600
offers high resolution 2D & 3D pro?ling, 2D stress, pro?le
stitching, and many more
features in an easy-to-use platform
with the best
price-to-performance available in the market.
The D-600 system includes
an innovative optical
lever sensor technology that provides the highest vertical
range at 1200 μm, sub-Angstrom resolution plus low force,
0.03 to 15 mg. The ability to measure a wide range
of applications, from nanometer to millimeter steps,
high resolution roughness, soft materials, and thin ?lm stress
enables the D-600
to serve various
industries in research
and development and production environments.
The D-600 includes
a 200 mm motorized stage,
with 150 x 178 mm X-Y range
of motion. The new sequencing software features manual deskew alignment and programming up to 1000
locations on a sample. The system
features advanced optics, a high resolution 5 MP camera with a 4x digital zoom
and enhanced video controls for highly
versatile sample visualization.
The D-600 is capable of addressing a wide range of
measurements and applications:
? Precision step
? Surface texture
? Material acterizations
? Thin ?lm stress
? 3D scanning
The D-600 stylus
pro?lers provide a wide range
of application speci?c
capabilities, meeting the needs
of the research, engineering, and production communities.
The 200 mm sample
stage supports scan
lengths up to 55 mm in a single scan
and up to 200 mm utilizing the stitching function. The D-600 provides
the highest vertical range at 1200 μm and low force
sensor technology at 0.03 mg, ensuring scan precision on an array
of applications, including thin ?lms, soft
materials, tall steps,
bow, and stress.
High Resolution Camera
The D-600 features
advanced optics that includes a high resolution 5 MP color camera with 4x digital
zoom and enhanced
correction software automatically removes video view
sample distortion due to the angled optics.
New arc correction software removes arc
motion error during
scanning, improving accuracy for sidewall angles
and step width
Scanning & 2D Stress (optional)
3D scanning produces photo-realistic surfaces, enabling
detailed surface topography analysis
of step height,
texture, and sample
form. 2D stress utilizes
Stoney’s Equation and
changes in sample
bow, before and
calculate thin ?lm stress.
Step Height Repeatability
A sub-Angstrom resolution, optical
lever sensor translates into the most repeatable low mass, low noise sensor design.
This enables step height
of 5 ? on a 1 μm step for demanding process needs.
Intuitive User Interface
simpli?ed recipe creation enables quick setup of 3D scans, sequencing for
multiple site measurements, sequence alignment reference points, and automated
stitching for ?lm stress.
system hardware controls are shown
in the same display for quick
sample positioning and measurement.Raw data is saved, enabling data re-analysis without the need
for new measurements.